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              1. 首页产品中心半导体领域 / 全自动晶体生长炉 TDR100B-ZJS
                全自动晶体生长炉
                TDR100B-ZJS
                设备参数
                拉制晶棒直径(Ingot Diameter):8”-10”
                装料量(Charge Amount):120-150kg
                热场规格(Hot Zone Size):22”-24”
                炉体高度(Maximum Height):6.40m
                极限真空(Uitimate Vacuum):≦30mtorr
                泄露率(Leakage Rate):≦40mtorr/h
                可控压力范围(Controllable Pressure Scope):10-50Torr
                晶体行程(Seed Travel):2900mm
                晶体慢速(Seed Lift Rate):0~8mm/min
                晶体快递(Fast Seed Lift Rate):≧600mm/min
                晶体旋转(Seed Rotation):0~48rpm
                坩埚行程(Crucibile Travel):460mm
                坩埚慢速(Crucible Lift Rate):0~4mm/min
                坩埚快递(Fast Crucible Lift Rate):≧150mm/min
                坩埚旋转(Crucible Rotation):0~20rpm
                 
                电源(Electrical)
                容量(Capacity):260KVA(含底部电源)
                供电电源(Power Supply):380V±10%,50/60Hz

                冷却水(Coolant Water)
                流量(Flow Rate):≥280L/min
                进水压力(Pressure):2.0-3.0bar
                进水温度(Temperature):25±2℃

                氩气(Argon)
                压力(Pressure):3.5~5bar
                流量(Flow Rate):60~80L/min

                压缩空气(Compressed Air)
                压力(Pressure):5~9bar
                消耗量(Consumption):80L/炉次
                联系我们
                jsjd@hobmod.com 0575-82001901 浙江省绍兴市上虞区通江西路218号
                重庆时时开奖官方网址版权所有 浙ICP备11013988号-1 CopyRight 2017 All Right Reseved Design By:
                版权所有重庆时时开奖官方网址
                CopyRight 2017 All Right Reseved Design By: